With the use of finite method we have developed computer simulation software for vacuum microtriodes with wedge - shaped and cone - shaped cathode on the basis of stduying deeply the field emission theory of vacuum microelectronics . the software included field section , grid point numbering , and the calculation of electric currents , transconductance and cathode capacitance , moreover , it can simulate the properties of vacuum microeletronic with variant structures and sizes . the relationship was studied and simulated among electic properties and device structures , sizes and cathode materials etc . the optimized design of vacuum microtiode was proposed 本文在深入研究真空微電子器件場致發(fā)射理論的基礎(chǔ)上,根據(jù)圓錐形、楔形陰極真空微電子三極管的不同特點(diǎn),分別建立了物理和數(shù)學(xué)模型,在考慮空間電荷密度影響的前提下,以有限元法為基礎(chǔ)采用迭代的方法計(jì)算出真空微電子三極管內(nèi)的電勢分布情況,繪制出了等勢線、電子軌跡線,并得到了器件電學(xué)性能隨幾何參數(shù)的變化情況。